School of Engineering
MIT (Massachusetts Institute of Technology)
Dennis S. Grimard received his Associates of Engineering (A.E.) degree in Mechanical Engineering Technology from Vermont Technical College in 1977 and his Bachelor of Science (B.S.) degree in electrical engineering from Worcester Polytechnic Institute in 1982. His post graduate work includes both a Master of Science (M.S.) and Doctor of Philosophy (Ph.D.) degrees in electrical engineering (majoring in Solid-State Physics and minoring in Circuits) from The University of Michigan at Ann Arbor in 1984 and 1990, respectively. His thesis title was “Utilizing Diffraction for Real-Time in Situ Wafer Monitoring.” Dr. Grimard worked in both industry (Cincinnati-Milacron, Ford Motor Company, Techware Systems, and IBM) and academia (post-doc, research scientist, and Managing Director of the Lurie Nanofabrication Facility) for more than 39 years. In addition, Dr. Grimard has served as an expert witness (Kirkland & Ellis) and consultant (IBM, Applied Materials, KLA-Tencor, Pivotal Systems, Watlow, Novellus, Veeco, Intavac, and PlasmaTherm) for more than 21 years. Currently, Dr. Grimard is the Associate Director of Operations and acting Managing Director for MIT’s 214,000 SF MIT.nano project; an ambitious state-of-the-art facility that will house more than 101,000 SF of new laboratory space which includes more than 47,000 SF of cleanroom and 11,000 SF of advanced imaging capacity. Dr. Grimard has co-authored numerous peer-reviewed papers addressing the theoretical and practical limitations of RF metrology and feed-forward control of complex systems. His consultancy has produced more than 20,000 hours of technical output and 1.5 million miles of travel resulting in more than 33 patents covering every aspect of semiconductor tool technology.